Energy Beam Sciences公司自从1965年起就专注于制造电子束应用相关的阴极、灯丝等各种部件。很多年来EBS一直为Amray, Thermo Scientific, Axcelis等工作做OEM代工. EMSIS ASIA是EBS的这些高性能、高稳定性和高性价比的产品在亚洲市场的代理。 

Lab6 Tip

六硼化镧阴极

EMSIS ASIA网站上有适合于各种TEM和SEM型号的各种LaB6阴极,包括标准圆尖、平尖和锐角尖。

标准 (圆头) 尖: 90° 圆锥角,15微米半径的圆形尖。

平 (钝角) 尖: 平尖适合于着重强调稳定性和长寿命的应用环境,在亮度上会有所折衷。

锐角尖: 锐角尖适合于以初始亮度为最重要考量而可以接受较短使用寿命的应用环境。锐角尖有两种规格:60° 圆锥角5微米半径和60° 圆锥角10微米半径。

 Lab6 cathode 2 Lab6 cathode 1

LaB6阴极的特性

  • 低电势垒 (逸出功)
  • 高熔点,高温下稳定性高
  • 低蒸汽压,所以减少了汽化损失
  • 化学稳定性高
  • 高亮度:LaB6 产生的电子束是钨灯丝的10倍,具有超高的分辨率,可以支持很宽的加速电压范围。可以用于生成细节度很高的高清晰图像。Denka Model 3 阴极的初始亮度 (1 x 106 A/cm2 str) 远超竞品的minivogel型阴极 (通常是 5 x 105 A/cm2)
  • 使用寿命长:发热和真空度决定了阴极的使用寿命。在 1550°C 和 10-7 Torr下使用寿命可以达到500小时。
  • 稳定性:基于高耐用度的设计,阴极稳定性 在1550°C下 > 3% 每小时。

参数

 

平尖

标准 (圆) 尖

Sharp Tip

Brightness

About 5 times that of tungsten, 2-5×105 A/cm2· Str

About 10 times that of tungsten, 1×106 A/cm2· Str

Twice as bright as standard tips 2×106 A/cm2· Str

Saturation

Mono spot at about 1,400°C

Mono spot at about 1,500°C.

Almost the same as standard tips

Crossover

Large (11-13µ)

Small (7-10µ)

Small (7-10µ)

Angular distribution

Broad, 3.3-4.2×10-2 rad

Sharp1.6 x10-2rad

Sharp1.6 x10-2 rad

Used Temperature.

Low temperature

Low temperature

High temperature.

Lifetime

Long life. Usable at low temp. Crystallized end changes slowly.

Long life but shorter than flat tips.

Short

Operation

Easy: Due large spot size and broad adjusting range.

Not so difficult.

Difficult; Point adjustment needed

Stability

High

High

Sensitive to thermal expansion or vibration. Adjustment sometimes necessary.

Technology Needed

Ordinary

High

Very high

Note: There are other LaB6 configurations available upon request.

 

MET Thermal Field Emission (Schottky) Cathode

The most commonly used Thermal Field Emitters are the MET-C (Denka 174C equivalent) and the MET-A (Denka 174 equivalent).

TFE1

 Specifications

 

 

Models

MET-C, MET-A

Operating Temperature

≤ 1850K. 1800K recommended

Filament current at 1800K

≤ 2.6A

Operating pressure

≤ 1.3×10-6Pa (1×10-8Torr).

2.7×10-7Pa (2×10-9Torr) recommended

Tip radius

0.4 to 0.7µm. Standard tolerance +/- 0.05µm

Cone Angle

>15°

Note: Other TFE Models are available, please contact for required tip radius of <0.4µm or >0.7µm.

 TFE drawing1